Piezoresistive pressure sensor based on flexo photosensitive Resin Plate

被引:0
作者
Akrami, Ferdos [1 ]
Hamedi, Samaneh [1 ]
机构
[1] Shiraz Univ Technol, Dept Elect & Elect Engn, Shiraz, Iran
来源
2023 5TH IRANIAN INTERNATIONAL CONFERENCE ON MICROELECTRONICS, IICM | 2023年
关键词
pressure sensor; piezoresistive; lithography;
D O I
10.1109/IICM60532.2023.10443177
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we propose and fabricate a new piezoresistive pressure sensor by combining micro-structured flexo photosensitive Resin Plate/ Ag and Ag interdigital electrodes through a low-cost process. These plates are made from light-sensitive polymers that are hardened by UV light. The proposed material as a flexible substrate has advantages like Excellent rebound resilience enables high-quality printing with sharp images, high resolution, Cost-effective, etc. our proposed sensor shows sensitivity (18.14 kPa(-1) and 458.2 kPa(-1) in the pressure range of 0 Pa to 1.2 kPa and 1.2-11 kPa), low detection limit (40 Pa), signal response (3.51 s) and recovery response (0.81 s). these characteristics allow the device to work in applications in intelligent robots, human-machine interfaces, and so forth.
引用
收藏
页码:177 / 180
页数:4
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