Calculations of electron scattering cross sections from tungsten precursors used in FEBID

In this work, the integral elastic, inelastic, ionization, and momentum transfer scattering cross sections of WF 6 , WCl 6 , and W(CO) (6) molecules are calculated using a quantum mechanical method. These are considered precursors for tungsten deposition using the focused electron beam-induced deposition (FEBID) technique. The spherical complex optical potential (SCOP) formalism is used to figure out the total elastic, inelastic, and momentum transfer cross sections. The complex scattering potential ionization contribution (CSP-ic) method is used to find the ionization cross sections in the inelastic channel. The calculations are performed on a fine grid in the energy range from the ionization potential to 5 keV. We have also reported comparisons of our data with available theoretical and experimental results. All types of scattering cross sections for WCl (6) is reported for the first time.