Research on absolute linear time-grating displacement sensor with one-pole-difference structure and analysis of measurement error characteristics

被引：0
|
作者：
Chen Z. [1 ,2 ]
Li X. [1 ,2 ]
Feng X. [1 ,2 ]
Chen H. [1 ,2 ]
Zhang H. [1 ,2 ]
Yu H. [1 ,2 ]
机构：
[1] Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing
[2] Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology, Chongqing
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2022年 / 30卷 / 06期
关键词：
Absolute displacement measurement; Measurement error analysis; One-pole-difference structure; Time-grating sensor;
D O I：
10.37188/OPE.20223006.0667
中图分类号：
学科分类号：
摘要：
Focusing on the problems of complex coding and strict lithography for absolute displacement sensors, a "precise number of pole + precise displacement within a pole" method of absolute displacement measurement using time-grating sensors with a one-pole-difference structure is proposed. The fixed ruler of the sensor comprises two rows of excitation windings with a one-pole-difference structure, which comprises cosine windings and sine windings arranged orthogonally in space. The orthogonal excitation current is applied to the excitation windings, and sinusoid induction windings in the moved ruler are employed to induce a time-varying magnetic field. Then, the two traveling wave signals with one-pole-difference are obtained. After signal decoupling, the absolute displacement can be obtained using the "precise number of pole + precise displacement within pole" method. Measurement accuracy caused by installation height and installation error is analyzed. The results demonstrate that the deflection angles of installation led to an amplitude increases in DC and second harmonics, and after error correction, the measuring accuracy reached ±1.2 µm within the range of 90 mm. Theoretically, the resolution reached 0.1 µm. © 2022, Science Press. All right reserved.
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页码：667 / 677
页数：10
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