Comprehensive study of charge-based motion control for piezoelectric nanopositioners: Modeling, instrumentation and controller design

被引：0

作者：

Yang, Chen ^{[1
]}

Xia, Fangzhou ^{[1
]}

Wang, Yi ^{[1
,2
]}

Youcef-Toumi, Kamal ^{[1
]}

机构：

[1] Department of Mechanical Engineering, Massachusetts Institute of Technology, United States

[2] Synfuels China, Beijing, China

来源：

关键词：

Compendex;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Motion control

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