Study of Humidity Sensor using α-Fe2O3 as a Humidity-sensitive Material

被引：0

作者：

Naito K. ^{[1
]}

Sasaki K. ^{[1
]}

Ikenaga N. ^{[1
]}

机构：

[1] Yatsukaho Research Campus, Kanazawa Institute of Technology, 3-1, Yatsukaho,Ishikawa, Hakusan

来源：

IEEJ Transactions on Sensors and Micromachines | 2023年 / 143卷 / 11期

关键词：

humidity sensor; humidity-sensitive materials; iron oxide thin film;

D O I：

10.1541/ieejsmas.143.351

中图分类号：

学科分类号：

摘要：

In this study, iron oxide thin films are prepared under various heat treatment conditions, and their crystal structures and moisture-sensitive characteristics were evaluated to clarify the usefulness of iron oxide thin films as humidity-sensitive materials for humidity sensors. In addition, the possibility of a humidity sensor with a wide dynamic range was investigated by evaluating the relationship between the film thickness of the iron oxide thin film, the electrode width of the device, and the humidity-sensitive characteristics. As a result, it was found that the crystal structure of α-Fe2O3 exhibits relatively good humidity sensitivity compared to other crystal structures, and that the sensitivity to humidity can be adjusted by appropriately selecting the electrode width and film thickness of the device. Therefore, the α-Fe2O3 thin film may be useful as a moisture-sensitive material for wide dynamic range humidity sensors by appropriately adjusting the film thickness and electrode width. © 2023 The Institute of Electrical Engineers of Japan.

引用

页码：351 / 356

页数：5

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