Fabrication and Characteristics of Electret using Fine Silica Powder and Its Application of Ultrasonic Sensor

被引：0
|
作者：
Kageyama, Kensuke [1 ]
Kobayashi, Kakeru [1 ]
Kawada, Yoshiaki [1 ]
Sakai, Takenobu [1 ]
机构：
[1] Saitama University, 255, Shimo-okubo, Sakura-ku, Saitama,338-8570, Japan
来源：
IEEJ Transactions on Sensors and Micromachines | 2022年 / 142卷 / 06期
关键词：
Compendex;
D O I：
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学科分类号：
摘要：
Silica
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页码：110 / 116
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