Preparation of ternary spin-coated thin films by mixing binary As-S and As-Se glass solutions

被引：3

作者：

Jancalek, Jiri ^{[1
]}

Slang, Stanislav ^{[1
]}

Jemelka, Jiri ^{[2
]}

Kurka, Michal ^{[1
]}

Palka, Karel ^{[1
,2
]}

Vlcek, Miroslav ^{[1
]}

机构：

[1] Univ Pardubice, Fac Chem Technol, Ctr Mat & Nanotechnol, Studentska 95, Pardubice 53210, Czech Republic

[2] Univ Pardubice, Fac Chem Technol, Dept Gen & Inorgan Chem, Studentska 95, Pardubice 53210, Czech Republic

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS-X | 2023年 / 17卷

关键词：

Chalcogenide glasses; Thin films; Spin; -coating; Solution mixture; CHALCOGENIDE GLASS; OPTICAL-PROPERTIES; ABSORPTION-EDGE; RAMAN-SPECTRA; WAVE-GUIDES; DEPOSITION; MICROLENSES; SELENIUM;

D O I：

10.1016/j.nocx.2022.100142

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We present comparison of spin-coated thin films prepared in traditional way from solution of dissolved bulk glass of particular ternary composition with films prepared from mixture of two separately dissolved binary bulk glasses targeting the same composition. The samples of five tie-line As-S-Se compositions ranging from As33S67 to As33Se67 were deposited in specular optical quality and thermal dependences of their optical properties, thickness, surface roughness, organic residual content, structure, and chemical resistance were studied. The deposited thin films were also structured by hot embossing at various temperatures to study the influence of source solution preparation on structuring process. Thin films prepared from solution mixtures show close physico-chemical properties to thin films prepared from solutions of corresponding bulk glasses.

引用

页数：10

共 49 条

[21] Selective wet etching of amorphous As2Se3 thin films [J].