Wafer Stage Modal Model Identification by Modified Vector Fitting Method

被引：0

作者：

Yang X. ^{[1
,2
]}

Zhang M. ^{[1
,2
]}

Cheng R. ^{[1
,2
]}

Zhu Y. ^{[1
,2
]}

Wang L. ^{[1
,2
]}

机构：

[1] State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing

[2] Beijing Key Laboratory of Precision, Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing

来源：

Journal of Beijing Institute of Technology (English Edition) | 2021年 / 30卷

基金：

中国国家自然科学基金;

关键词：

System identification; Vector fitting; Wafer stage;

D O I：

10.15918/j.jbit1004-0579.20052

中图分类号：

学科分类号：

摘要：

Vector fitting is modified in this study for the parametric identification of a model with an undamped rigid body mode in the frequency domain. The modal model of a six-degree-of-freedom (6DOF) wafer stage is identified using the modified vector fitting method. The modal model is typically fitted from the matrix fraction description (MFD) form of the transfer function, which increases the cost function. The vector fitting in frequency domain provides an approach to fitting the modal model directly from frequency response functions(FRFs) via a partial rational basis function, the poles of which can be obtained by pole relocation technology. The traditional vector fitting method is not applicable in identifying systems containing rigid body modes. The method is reformulated here and effectively applied for wafer stage identification. The accuracy of the fitted model is validated by control loop simulation. © 2020 Journal of Beijing Institute of Technology

引用

页码：187 / 195

页数：8