Data-Driven Modelling and Robust Control of a Semiconductor Manufacturing Process

被引：0

作者：

Mayr, Paul ^{[1
]}

Kleindienst, Martin ^{[2
]}

Koch, Stefan ^{[1
]}

Reichhartinger, Markus ^{[3
]}

Horn, Martin ^{[1
]}

机构：

[1] Graz Univ Technol, Inst Automat & Control, Christian Doppler Lab Model Based Control Complex, Graz, Austria

[2] Lam Res AG, Villach, Austria

[3] Graz Univ Technol, Inst Automat & Control, Graz, Austria

来源：

IFAC PAPERSONLINE | 2023年 / 56卷 / 02期

关键词：

Data-driven control; Distributed parameter systems; Model order reduction; TEMPERATURE CONTROL; DECOMPOSITION; DESIGN;

D O I：

10.1016/j.ifacol.2023.10.1780

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The paper presents a model-based controller design technique for a thermal process in silicon wafer manufacturing. The underlying model is obtained by dynamic mode decomposition which is a purely data-driven approach. The control scheme consists of a state feedback controller in combination with a disturbance observer, which allows robust tracking of feasible reference temperature profiles. The approach is validated using a laboratory setup.

引用

页码：4234 / 4239

页数：6

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