Data-Driven Modelling and Robust Control of a Semiconductor Manufacturing Process

被引：0
作者：
Mayr, Paul [1 ]
Kleindienst, Martin [2 ]
Koch, Stefan [1 ]
Reichhartinger, Markus [3 ]
Horn, Martin [1 ]
机构：
[1] Graz Univ Technol, Inst Automat & Control, Christian Doppler Lab Model Based Control Complex, Graz, Austria
[2] Lam Res AG, Villach, Austria
[3] Graz Univ Technol, Inst Automat & Control, Graz, Austria
来源：
IFAC PAPERSONLINE | 2023年 / 56卷 / 02期
关键词：
Data-driven control; Distributed parameter systems; Model order reduction; TEMPERATURE CONTROL; DECOMPOSITION; DESIGN;
D O I：
10.1016/j.ifacol.2023.10.1780
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The paper presents a model-based controller design technique for a thermal process in silicon wafer manufacturing. The underlying model is obtained by dynamic mode decomposition which is a purely data-driven approach. The control scheme consists of a state feedback controller in combination with a disturbance observer, which allows robust tracking of feasible reference temperature profiles. The approach is validated using a laboratory setup.
引用
收藏
页码：4234 / 4239
页数：6
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