Structure and Optical-Electric Properties of VO2 Films Prepared by Annealing V Films

被引：0
作者：
Yuan W. [1 ]
Liu B. [2 ]
机构：
[1] Wuhan Global Sensor Technology Co. Ltd., Wuhan
[2] State Key Laboratory of Silicate Materials for Architectures, Wuhan University of Technology, Wuhan
来源：
Kuei Suan Jen Hsueh Pao/Journal of the Chinese Ceramic Society | 2021年 / 49卷 / 06期
关键词：
Magnetron sputtering; Semiconductor-metal transition; Vacuum post-annealing; Vanadium dioxide films;
D O I：
10.14062/j.issn.0454-5648.20200608
中图分类号：
学科分类号：
摘要：
Metal V films were prepared on quartz substrates via magnetron sputtering, and then converted to VO2 films via vacuum annealing. The effect of annealing temperature on the surface morphologies, crystalline structures, optical properties and electric properties of VO2 films was investigated. The results show that the crystallinity of the films increases with the increase of annealing temperature from 300℃ to 450℃. The films annealed at 400℃ and 450℃ are a pure monoclinic phase. The grains grow better and the grain boundaries are clear. The valent states of V element for different samples include +4 and +5 states. The presence of V5+ in the films is due to the oxidation in atmosphere. The annealing temperature has little effect on the visible transmittance, but the solar modulation efficiency increases. The metal-insulator transition (MIT) temperature and the resistance of semiconductor phase increase with increasing the annealing temperature. The resistance change amplitude across the MIT for the films annealed at 400℃ and 450℃ is more than 2 orders of magnitude. The hysteresis width and the MIT temperature of the film annealed at 450℃ are 14.6℃ and 61.0℃, respectively. © 2021, Editorial Department of Journal of the Chinese Ceramic Society. All right reserved.
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页码：1151 / 1156
页数：5
相关论文
共 22 条
[1]  
HUOVILA P., Buildings and climate change: Status, challenges, and opportunities, pp. 1-30, (2007)
[2]  
GAO Y F, LUO H J, ZHANG Z T, Et al., Nanoceramic VO<sub>2</sub> thermochromic smart glass: A review on progress in solution processing, Nano Energy, 1, pp. 221-246, (2012)
[3]  
PASZTORY Z, GORBACHEVA G, CZIMONDOR D, Et al., The effects of windows and reduced night temperature on the heating energy demand in different regions of Russia, IOP Conf Ser: Mater Sci Eng, 371, (2018)
[4]  
BAHULANAM S M, ERIKSSON T S, NIKLASSON G A, Et al., Thermochromic VO<sub>2</sub> films for energy-efficient windows, Sol Energ Mater, 16, pp. 347-363, (1987)
[5]  
KANG M, KIM S W, RYU J-M, Et al., Optical properties for the Mott transition in VO<sub>2</sub>, AIP Adv, 2, (2012)
[6]  
LEAHU G, VOTI R L, SIBILI C, Et al., Anomalous optical switching and thermal hysteresis during semiconductor-metal phase transition of VO<sub>2</sub> films on Si substrate, Appl Phys Lett, 103, (2013)
[7]  
SUN Dandan, CHEN Zhi, WEN Qiye, Et al., Acta Phys Sin, 62, (2013)
[8]  
HEINILEHTO S T, LAPPALAINEN J H, JANTUNENH M, Et al., IR-wavelength optical shutter based on ITO/VO<sub>2</sub>/ITO thin film stack, J Electroceram, 27, pp. 7-12, (2011)
[9]  
JI H, LIU D, ZHANG C, CHENG H., VO<sub>2</sub>/ZnS core-shell nanoparticle for the adaptive infrared camouflage application with modified color and enhanced oxidation resistance, Sol Energ Mat Sol C, 176, pp. 1-8, (2018)
[10]  
LU Yuan, LING Yongshun, FENG Yunsong, Et al., Infrared Laser Eng, 41, pp. 2886-2890, (2012)
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