High-sensitivity refractive index sensors based on Fano resonance in a metal-insulator-metal based arc-shaped resonator coupled with a rectangular stub

被引：0
|
作者：
闫树斌 [1 ]
苏浩 [2 ]
张晓宇 [3 ]
张怡 [1 ]
陈展博 [1 ]
吴秀山 [1 ]
华尔天 [1 ]
机构：
[1] School of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Zhejiang–Belarus Joint Laboratory of Intelligent Equipment and System for Water Conservancy and Hydropower Safety Monitoring
[2] Hangzhou Hikvision Digital Technology Co., Ltd.
[3] School of Electrical and Control Engineering, North University of China
来源：
Chinese Physics B | 2022年 / 10期
基金：
中国国家自然科学基金;
关键词：
D O I：
暂无
中图分类号：
TP212 [发送器（变换器）、传感器];
学科分类号：
080202 ;
摘要：
A metal-insulator-metal(MIM)-based arc-shaped resonator coupled with a rectangular stub(MARS) structure is proposed. This structure can generate two tunable Fano resonances originating from two different mechanisms. The structure has the advantage of being sensitive to the refractive index, and this feature makes it favorable for application in various microsensors. The relationship between the structural parameters and Fano resonance is researched using the finite element method(FEM) based on the software COMSOL Multiphysics 5.4. The simulation reveals that the sensitivity reaches1900 nm/refractive index unit(RIU), and the figure of merit(FOM) is 23.75.
引用
收藏
页码：664 / 668
页数：5
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