SHARP 1.54 MU-M LUMINESCENCE FROM POROUS ERBIUM IMPLANTED SILICON

被引:17
作者
TASKIN, T
GARDELIS, S
EVANS, JH
HAMILTON, B
PEAKER, AR
机构
[1] Centre for Electronic Materials, University of Manchester Institute of Science and Technology, Manchester, M60 1QD
关键词
LUMINESCENCE; POROUS SILICON;
D O I
10.1049/el:19951439
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Sharp luminescence at 1.54 mu m from erbium doped porous silicon has been observed. The silicon was made porous after implantation of high doses of erbium and oxygen into p-type Czochralski silicon. The erbium related luminescence from porous silicon is an order of magnitude more intense than that from erbium doped single crystal silicon.
引用
收藏
页码:2132 / 2133
页数:2
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