QUANTITATIVE HIGH-SPEED MATCHING OF HIGH-RESOLUTION ELECTRON-MICROSCOPY IMAGES

被引:33
|
作者
THUST, A
URBAN, K
机构
[1] Institut für Festkörperforschung, Forschungszentrum Jülich GmbH, W-5170 Jülich
关键词
D O I
10.1016/0304-3991(92)90035-I
中图分类号
TH742 [显微镜];
学科分类号
摘要
A procedure has been developed which allows the sample thickness and the defocus value of high-resolution electron microscopy micrographs to be determined. The cross-correlation coefficients between an experimental input image of a crystalline specimen and a large number of simulated images covering the whole defocus-thickness plane are evaluated in Fourier space. The result of this defocus-thickness scan is displayed by means of a cross-correlation map. Using a through-focus series of the ordered alloy Ni4Mo as an example, it is demonstrated that an unambiguous determination of the experimental parameters on a local level within a micrograph is possible. Moreover, if simulated images are used as input instead of experimental images, the cross-correlation method allows a simple and effective calculation of maps displaying the occurrence of certain image types of special interest in the defocus-thickness plane.
引用
收藏
页码:23 / 42
页数:20
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