AUGER ELECTRON SPECTROMETER AS A TOOL FOR SURFACE ANALYSIS (CONTAMINATION MONITOR)

被引：34
作者：
TAYLOR, NJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 01期
关键词：
D O I：
10.1116/1.1492671
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：241 / &
相关论文
共 11 条
[1]   REFLECTION OF SLOW ELECTRONS BY HYDROGEN-COVERED SINGLE CRYSTALS OF TUNGSTEN [J].
ARMSTRONG, RA .
CANADIAN JOURNAL OF PHYSICS, 1966, 44 (08) :1753-+
[2]  
BURHOP EHS, 1952, AUGER EFFECT OTHER R
[3]   SURFACE POTENTIALS AND ADSORPTION PROCESS ON METALS [J].
CULVER, RV ;
TOMPKINS, FC .
ADVANCES IN CATALYSIS, 1959, 11 :67-131
[4]   ANALYSIS OF MATERIALS BY ELECTRON-EXCITED AUGER ELECTRONS [J].
HARRIS, LA .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (03) :1419-&
[5]   AUGER ELECTRON EMISSION IN THE ENERGY SPECTRA OF SECONDARY ELECTRONS FROM MO AND W [J].
HARROWER, GA .
PHYSICAL REVIEW, 1956, 102 (02) :340-347
[6]   On the analysis of electronic velocities by electrostatic means [J].
Hughes, AL ;
Rojansky, V .
PHYSICAL REVIEW, 1929, 34 (02) :284-290
[7]   AUGER PEAKS IN THE ENERGY SPECTRA OF SECONDARY ELECTRONS FROM VARIOUS MATERIALS [J].
LANDER, JJ .
PHYSICAL REVIEW, 1953, 91 (06) :1382-1387
[8]   AUGER ELECTRON SPECTROSCOPY OF FCC METAL SURFACES [J].
PALMBERG, PW ;
RHODIN, TN .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (05) :2425-&
[9]   GENERATION OF CLEAN SURFACES IN HIGH VACUUM [J].
ROBERTS, RW .
BRITISH JOURNAL OF APPLIED PHYSICS, 1963, 14 (09) :537-&
[10]   USE OF LEED APPARATUS FOR DETECTION AND IDENTIFICATION OF SURFACE CONTAMINANTS [J].
WEBER, RE ;
PERIA, WT .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (11) :4355-&
12