INSITU VAPORIZATION OF VERY LOW-MOLECULAR WEIGHT RESISTS USING 1-2 NM DIAMETER ELECTRON-BEAMS

被引：100

作者：

ISAACSON, M ^{[1
]}

MURRAY, A ^{[1
]}

机构：

[1] CORNELL UNIV,NATL RES & RESOURCE FACIL SUBMICRON STRUCT,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571180

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1117 / 1120

页数：4

共 13 条

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