120-GHz long-wavelength low-capacitance photodetector with an air-bridged coplanar metal waveguide

被引：21
作者：
Tan, IH
Sum, CK
Giboney, KS
Bowers, JE
Hu, EL
Miller, BI
Capik, RJ
机构：
[1] UNIV CALIF SANTA BARBARA,DEPT ELECT & COMP ENGN,SANTA BARBARA,CA 93106
[2] AT&T BELL LABS,HOLMDEL,NJ 07733
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 1995年 / 7卷 / 12期
关键词：
D O I：
10.1109/68.477288
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate a long-wavelength detector structure using an undercut mesa and an air-bridged coplanar metal waveguide to significantly reduce both the diode RC constant and the parasitic capacitance, Record electrical bandwidths of 120 GHz are demonstrated for long-wavelength photodetectors.
引用
收藏
页码：1477 / 1479
页数：3
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