PREPARATION AND CHARACTERIZATION OF ALUMINA FILMS PREPARED BY A NOVEL SPRAY PYROLYSIS METHOD

被引：14
作者：
DESISTO, WJ
QIAN, YT
HANNIGAN, C
EDWARDS, JO
KERSHAW, R
DWIGHT, K
WOLD, A
机构：
[1] Department of Chemistry, Brown University Providence
来源：
MATERIALS RESEARCH BULLETIN | 1990年 / 25卷 / 02期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1016/0025-5408(90)90044-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Alumina thin films of 2000 Å were deposited on n-type silicon wafers by a novel spray pyrolysis method. The spray solution contained an aluminum acetylacetonate complex which was characterized by NMR techniques. The deposited films of Al2O3 were homogeneous, uniform, dense and had breakdown potentials of greater than 10 V. © 1990.
引用
收藏
页码：183 / 189
页数：7
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