NITROGEN ION-BEAM INDUCED RECRYSTALLIZATION OF ALNX FILMS

被引：0
|
作者：
KOBAYASHI, K
NAMBA, S
FUJIHANA, T
DAI, Y
IWAKI, M
机构：
[1] ADV TECHNOL INC,KANAGAWA 245,JAPAN
[2] INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：689 / 692
页数：4
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