MAXIMUM THICKNESS OF AMORPHOUS NIZR INTERLAYERS FORMED BY A SOLID-STATE REACTION TECHNIQUE

被引：82
|
作者：
MENG, WJ
NIEH, CW
JOHNSON, WL
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 21期
关键词：
D O I：
10.1063/1.98546
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1693 / 1695
页数：3
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