CHARACTERISTICS OF RF SPUTTERED BARIUM TITANATE THIN FILMS

被引：28

作者：

PRATT, IH

机构：

来源：

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS | 1971年 / 59卷 / 10期

关键词：

D O I：

10.1109/PROC.1971.8452

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1440 / &

共 38 条

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[4]

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[5]

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[6]

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DIAMANT, H ;

DRENCK, K ;

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[9] COMPOUNDS WITH HEXAGONAL BARIUM TITANATE STRUCTURE [J].

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KATZ, L ;

WARD, R .

[10]

Feuersanger A. E., 1969, THIN FILM DIELECTRIC, P209