PREPARATION OF TUNGSTEN NITRIDE FILM BY CVD METHOD USING WF6

被引：89
|
作者：
NAKAJIMA, T
WATANABE, K
WATANABE, N
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 12期
关键词：
D O I：
10.1149/1.2100365
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：3175 / 3178
页数：4
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