EFFECT OF RECONSTRUCTION DURING EPITAXIAL-GROWTH

被引:20
作者
VANVECHTEN, JA [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 04期
关键词
D O I
10.1116/1.569410
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:992 / 998
页数:7
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