NEW COMPENSATING 4-PHASE ALGORITHM FOR PHASE-SHIFT INTERFEROMETRY

被引：150

作者：

SCHWIDER, J

FALKENSTORFER, O

SCHREIBER, H

ZOLLER, A

STREIBL, N

机构：

[1] Univ Erlangen-Nurnberg, Erlangen

来源：

OPTICAL ENGINEERING | 1993年 / 32卷 / 08期

关键词：

INTERFEROMETRY; PHASE-SHIFTING;

D O I：

10.1117/12.143340

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Phase-shift interferometry suffers from periodic systematic errors caused by erroneous reference phase adjustments and instabilities of the interferometer. A new method is described that uses only four interferograms and eliminates the errors caused by linear adjustment deviations of the reference phase or the mean phase in the interferometer. Test results confirm the theoretical predictions.

引用

页码：1883 / 1885

页数：3

共 7 条

[1]

CarreP, 1966, METROLOGIA, V2, P13, DOI DOI 10.1088/0026-1394/2/1/005

[2]

Creath K., 1988, Progress in optics. Vol.XXVI, P349, DOI 10.1016/S0079-6638(08)70178-1

[3] DIGITAL PHASE-SHIFTING INTERFEROMETRY - A SIMPLE ERROR-COMPENSATING PHASE CALCULATION ALGORITHM [J].