A NEW METHOD FOR THE GENERATION OF DIAMOND NUCLEI BY PLASMA CVD

被引：44

作者：

YUGO, S ^{[1
]}

KANAI, T ^{[1
]}

KIMURA, T ^{[1
]}

机构：

[1] UNIV ELECTROCOMMUN, CHOFU, TOKYO 182, JAPAN

来源：

关键词：

D O I：

10.1016/0925-9635(92)90063-T

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new method is proposed for the generation of high density diamond nuclei in the microwave plasma CVD. Application of negative DC biases of more than 70 V on the substrate together with methane contents higher than 5% in hydrogen as a pretreatment process has been found to generate diamond nuclei as high as 1010/cm2 on mirror-polished silicon surfaces. It has been shown that carbon over-saturation and energy of ion species in the plasma as well as chemical properties of hydrogen ions play an important role in the generation of high density diamond nuclei in the pretreatment process. © 1992.

引用

页码：388 / 391

页数：4

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