INFLUENCE OF NUCLEATING SURFACE ON SPUTTERED ZNO THIN-FILMS

被引:16
作者
HILLMAN, GD [1 ]
SEGUIN, HJJ [1 ]
机构
[1] UNIV ALBERTA,DEPT ELECT ENGN,EDMONTON,ALBERTA,CANADA
关键词
D O I
10.1063/1.1662086
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:5053 / 5055
页数:3
相关论文
共 9 条
[1]  
FAHMY AH, 1972, IEEE T SONICS ULTRAS, VSU19, P346
[2]   CRYSTALLOGRAPHIC ORIENTATION OF ZINC OXIDE FILMS DEPOSITED BY TRIODE SPUTTERING [J].
FOSTER, NF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :111-&
[3]   DEPOSITION AND PIEZOELECTRIC CHARACTERISTICS OF SPUTTERED LITHIUM NIOBATE FILMS [J].
FOSTER, NF .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (01) :420-+
[4]   PIEZOELECTRIC TRANSDUCER MATERIALS [J].
JAFFE, H ;
BERLINCOURT, DA .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1965, 53 (10) :1372-+
[5]  
KLERK JD, 1964, APPL PHYS LETT, V5, P2
[6]  
KLERK JD, 1965, REV SCI INSTRUM, V36, P506
[7]   EPITAXIAL THIN FILMS OF ZNO ON CDS AND SAPPHIRE [J].
ROZGONYI, GA ;
POLITO, WJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :115-&
[8]  
SITTIG EK, 1969, J APPL PHYS, V40, P4341
[9]  
WINSLOW DK, 1969, J VAC SCI TECHNOL, V6, P111