GROWTH OF GRAIN-ORIENTED TUNGSTEN BRONZE SBN FILMS ON SI

被引:28
作者
NEURGAONKAR, RR
SANTHA, IS
OLIVER, JR
机构
[1] Rockwell International Science Center Thousand Oaks
关键词
BRONZE; TUNGSTEN; BARIUM; STRONTIUM; NIOBIUM;
D O I
10.1016/0025-5408(91)90079-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper reports preliminary results on the growth of grain-oriented tungsten bronze Ce-doped Sr1-xBaxNb2O6 (SBN) thin films on (100)-oriented Si substrates. Grain orientation was maintained in these films up to 4-mu-m thickness using high oxygen pressure annealing up to 700-degrees-C. The films are smooth and have excellent surface quality. The temperature dependence of the dielectric constant indicates the phase transition is near 30-degrees-C, with a dielectric constant of 1400 at room temperature. The spontaneous polarization for these films is 1.3-mu-coul/cm2 at room temperature and 6.5-mu-coul/cm2 at -125-degrees-C.
引用
收藏
页码:983 / 988
页数:6
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