POLYIMIDE SURFACE DEGRADATION - X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY UNDER UV-PULSED LASER IRRADIATION

被引:0
|
作者
CHTAIB, M
ROBERFROID, EM
NOVIS, Y
PIREAUX, JJ
CAUDANO, R
机构
来源
ACS SYMPOSIUM SERIES | 1990年 / 440卷
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中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Polyimide surface modifications under UV ArF (lambda = 193 nm) laser irradiation in air were studied by X-ray Photoelectron Spectroscopy (XPS). Several chemical transformations, the nature of which changed with fluence (energy per pulse and unit area), were evidenced at the polymer surface. A sharp decrease in the O/C and N/C signals was observed at fluence higher than 20mJ/cm2 and new carbon species appeared. At higher fluence (above 40 mJ/cm2) complete denitrification took place and the chemical nature of the surface was completely modified.
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页码:161 / 169
页数:9
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