FORMATION OF AG SINGLE-CRYSTALLINE THIN-FILMS BY ION-IMPLANTATION WITH N+-XE+

被引:0
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作者
ZHANG, YC [1 ]
YANG, NH [1 ]
PANG, SJ [1 ]
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[1] CHINESE ACAD SCI,BEIJING LAB VACUUM PHYS,BEIJING,PEOPLES R CHINA
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T [工业技术];
学科分类号
08 ;
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页码:1264 / 1267
页数:4
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