TITANIUM IN-DIFFUSED LINBO3 OPTICAL-WAVEGUIDE FABRICATION

被引：13
作者：
STULZ, LW
机构：
[1] Bell Laboratories, Crawford Hill Laboratory, Holmdel, New Jersey
来源：
APPLIED OPTICS | 1979年 / 18卷 / 12期
关键词：
D O I：
10.1364/AO.18.002041
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Techniques used to fabricate titanium in-diffused optical waveguide devices in LiNbO3 are described. The processes described include photolithography, precision mask orientation and registration, metal diffusion, waveguide end polishing, and crystal cleaving. © 1979 Optical Society of America.
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页码：2041 / 2044
页数：4
相关论文
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