SILICON OXYNITRIDE STABILITY

被引:40
|
作者
RYALL, WR
MUAN, A
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10.1126/science.165.3900.1363
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
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页码:1363 / &
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