CHARGE NEUTRALIZATION OF INSULATING SURFACES IN THE SEM BY GAS IONIZATION

被引:88
作者
MONCRIEFF, DA [1 ]
ROBINSON, VNE [1 ]
HARRIS, LB [1 ]
机构
[1] UNIV NEW S WALES,FAC APPL SCI,KENSINGTON 2033,NEW S WALES,AUSTRALIA
关键词
D O I
10.1088/0022-3727/11/17/002
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:2315 / 2325
页数:11
相关论文
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