NEW MODEL OF ELECTRON FREE-PATH IN MULTIPLE LAYERS FOR MONTE-CARLO SIMULATION

被引:39
作者
HORIGUCHI, S
SUZUKI, M
KOBAYASHI, T
YOSHINO, H
SAKAKIBARA, Y
机构
关键词
D O I
10.1063/1.92785
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:512 / 514
页数:3
相关论文
共 7 条
[1]   ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING [J].
HAWRYLUK, RJ ;
HAWRYLUK, AM ;
SMITH, HI .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (06) :2551-2566
[2]   CHLOROMETHYLATED POLYSTYRENE AS A DRY ETCHING-RESISTANT NEGATIVE RESIST FOR SUB-MICRON TECHNOLOGY [J].
IMAMURA, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (09) :1628-1630
[3]   QUANTITATIVE ELECTRON-MICROPROBE ANALYSIS OF THIN-FILMS ON SUBSTRATES [J].
KYSER, DF ;
MURATA, K .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1974, 18 (04) :352-363
[4]   MONTE-CARLO SIMULATION OF SPATIALLY DISTRIBUTED BEAMS IN ELECTRON-BEAM LITHOGRAPHY [J].
KYSER, DF ;
VISWANATHAN, NS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1305-1308
[5]   3-DIMENSIONAL STUDY OF ABSORBED ENERGY DENSITY IN ELECTRON-RESIST FILMS ON SUBSTRATES [J].
MURATA, K ;
NOMURA, E ;
NAGAMI, K ;
KATO, T ;
NAKATA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (10) :1851-1860
[6]   MONTE CARLO CALCULATIONS ON ELECTRON SCATTERING IN A SOLID TARGET [J].
MURATA, K ;
MATSUKAWA, T ;
SHIMIZU, R .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (06) :678-+
[7]   ENERGY DEPOSITION FUNCTIONS IN ELECTRON RESIST FILMS ON SUBSTRATES [J].
PARIKH, M ;
KYSER, DF .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (02) :1104-1111