INVESTIGATION OF CRYSTAL-STRUCTURE OF CUBIC SILICON-CARBIDE LAYERS

被引：7

作者：

SAIDOV, MS

SHAMURATOV, KA

KADYROV, MA

VLASKINA, SI

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 97卷 / 02期

关键词：

D O I：

10.1002/pssa.2210970203

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：347 / 351

页数：5

共 9 条

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[3]

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[5] PRODUCTION OF LARGE-AREA SINGLE-CRYSTAL WAFERS OF CUBIC SIC FOR SEMICONDUCTOR-DEVICES [J].

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[6]

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[7]

SAIDOV MS, 1970, PROTESSI ROSTA KRIST, P299

[8]

SAIDOV MS, 1973, IZV AKAD NAUK UZ FMN, P56

[9]

SAIDOV MS, 1985, DOKL AKAD NAUK UZSSR, P26

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