ELLIPSOMETRIC INVESTIGATION OF ELECTROOPTIC AND ELECTROSTRICTIVE EFFECTS IN ANODIC TA2O5 FILMS

被引：34

作者：

CORNISH, WD ^{[1
]}

YOUNG, L ^{[1
]}

机构：

[1] UNIV BRITISH COLUMBIA,ELECT ENGN DEPT,VANCOUVER 8,BRITISH COLUMBI,CANADA

来源：

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 1973年 / 335卷 / 1600期

关键词：

D O I：

10.1098/rspa.1973.0112

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：39 / 50

页数：12

共 16 条

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CHEN, FS .

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[2]

DELLOCA CJ, 1970, J ELECTROCHEM SOC, V117, P1545, DOI [10.1149/1.2407379, 10.1149/1.2407380]

[3]

DELLOCA CJ, 1971, PHYSICS THIN FILMS, V6

[4]

DIGNAM MJ, 1972, ANODIC BEHAVIOR META, V1

[5]

ENGELSEN DD, 1971, J OPT SOC AM, V61, P1460

[6] ELECTRIC-FIELD-INDUCED SHIFT OF INTERFERENCE PEAKS OF THIN TANTALUM OXIDE FILMS [J].

FROVA, A ;

MIGLIORA.P .

APPLIED PHYSICS LETTERS, 1968, 13 (09) :328-&

[7] ELECTRO-OPTIC EFFECT AND MODULATED INTERFERENCE IN TANTALUM OXIDE FILMS [J].

FROVA, A ;

MIGLIORATO, P .

APPLIED PHYSICS LETTERS, 1969, 15 (12) :406-+

[8] MEASUREMENT OF ANODIC OXIDE FILM THICKNESS BY ELECTROREFLECTANCE INTERFEROMETRY [J].

HOLDEN, BJ ;

ULLMAN, FG .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (02) :280-&

[9]

HOLDEN BJ, 1967, B AM PHYS SOC, V12, P1132

[10] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+

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