INVESTIGATION OF DISTRIBUTION OF BORON ATOMS IN SILICON DOPED BY ION BOMBARDMENT

被引：0
作者：
ZORIN, EI
PAVLOV, PV
TETELBAU.DI
机构：
来源：
SOVIET PHYSICS SOLID STATE,USSR | 1968年 / 9卷 / 12期
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中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
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页码：2874 / +
页数：1
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