CONTINUUM MODEL OF THIN-FILM DEPOSITION AND GROWTH

被引：7
|
作者：
BERNOFF, AJ
LICHTER, S
机构：
[1] UNIV ARIZONA,DEPT MATH,TUCSON,AZ 85721
[2] UNIV ARIZONA,DEPT AEROSP & MECH ENGN,TUCSON,AZ 85721
来源：
PHYSICAL REVIEW B | 1989年 / 39卷 / 15期
关键词：
D O I：
10.1103/PhysRevB.39.10560
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：10560 / 10569
页数：10
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