COMPARISON OF MICROWAVE AND LOWER FREQUENCY DISCHARGES FOR PLASMA POLYMERIZATION

被引:0
|
作者
CLAUDE, R
MOISAN, M
WERTHEIMER, MR
机构
[1] ECOLE POLYTECH,DEPT ENGN PHYS,MONTREAL H3C 3A7,QUEBEC,CANADA
[2] UNIV MONTREAL,DEPT PHYS,MONTREAL H3C 3J7,QUEBEC,CANADA
关键词
D O I
暂无
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:40 / PMSE
相关论文
共 50 条
  • [31] Plasma chemistry of nonequilibrium microwave discharges. Status and tendency
    Lebedev, YA
    JOURNAL DE PHYSIQUE IV, 1998, 8 (P7): : 369 - 380
  • [32] Plasma power balance: methodology and investigations of microwave capillary discharges
    Coquery, F.
    Leroy, O.
    Minea, T.
    Stancu, G. D.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2022, 31 (05):
  • [33] Spatial structure of waves and plasma uniformity in planar microwave discharges
    Yasaka, Yasuyoshi
    Sakae, Atsushi
    Sugimoto, Naoki
    Takeno, Hiromasa
    Hojo, Hitoshi
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (10B): : 8059 - 8064
  • [34] OPTICAL, MICROWAVE, AND MASS-SPECTROSCOPY OF PLASMA PROCESSING DISCHARGES
    VERDEYEN, JT
    HEBNER, G
    NORDHEDEN, K
    OVERZET, L
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C311 - C311
  • [35] Chaotic fluctuations and a plasma density change at the beginning of microwave discharges
    Kaga, J
    Kogoshi, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1997, 36 (1AB): : L64 - L66
  • [36] Electrostatic modelling of dual frequency rf plasma discharges
    Boyle, PC
    Ellingboe, AR
    Turner, MM
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2004, 13 (03): : 493 - 503
  • [37] Nonlinear plasma dynamics in capacitive radio frequency discharges
    Mussenbrock, Thomas
    Brinkmann, Ralf Peter
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2007, 16 (02): : 377 - 385
  • [38] Frequency effects of plasma bullets in atmospheric glow discharges
    Walsh, James L.
    Kong, Michael G.
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2008, 36 (04) : 954 - 955
  • [40] MACROSCOPIC MODELING OF RADIO-FREQUENCY PLASMA DISCHARGES
    MISIUM, GR
    LICHTENBERG, AJ
    LIEBERMAN, MA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 1007 - 1013