COMPARISON OF MICROWAVE AND LOWER FREQUENCY DISCHARGES FOR PLASMA POLYMERIZATION

被引：0
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作者：
CLAUDE, R
MOISAN, M
WERTHEIMER, MR
机构：
[1] ECOLE POLYTECH,DEPT ENGN PHYS,MONTREAL H3C 3A7,QUEBEC,CANADA
[2] UNIV MONTREAL,DEPT PHYS,MONTREAL H3C 3J7,QUEBEC,CANADA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1987年 / 193卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：40 / PMSE
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