COMPARISON OF MICROWAVE AND LOWER FREQUENCY DISCHARGES FOR PLASMA POLYMERIZATION

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作者
CLAUDE, R
MOISAN, M
WERTHEIMER, MR
机构
[1] ECOLE POLYTECH,DEPT ENGN PHYS,MONTREAL H3C 3A7,QUEBEC,CANADA
[2] UNIV MONTREAL,DEPT PHYS,MONTREAL H3C 3J7,QUEBEC,CANADA
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O6 [化学];
学科分类号
0703 ;
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页码:40 / PMSE
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