ANALYSIS AND CONTROL OF FLOATING-BODY BIPOLAR EFFECTS IN FULLY DEPLETED SUBMICROMETER SOI MOSFETS

Floating-body effects triggered by impact ionization in fully depleted submicrometer SOI MOSFET's are analyzed based on two-dimensional device simulations. The parasitic bipolar junction transistor (BJT) effects are emphasized, but the kink effect and its disappearance in the fully depleted device are first explained physically to provide a basis for the BJT analysis. Copious simulations of the BJT-induced breakdown and latch phenomena are done, and parametric dependences are examined to give physical insight for optimal design. The analysis further relates the dc breakdown and latch mechanisms in the fully depleted submicrometer SOI MOSFET to actual BJT-related problems in an operating SOI CMOS circuit. A comprehensive understanding of the floating-body effects is attained, and a device design to control them utilizing a lightly doped source (LDS) is suggested and shown to be feasible.