HIGH-RESOLUTION SPUTTERING USING A FOCUSED ION-BEAM

被引：43

作者：

KUBENA, RL

SELIGER, RL

STEVENS, EH

机构：

来源：

THIN SOLID FILMS | 1982年 / 92卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(82)90199-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：165 / 169

页数：5

共 13 条

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[9] GAAS-MESFET FABRICATION USING MASKLESS ION-IMPLANTATION [J].

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