APPLICATION OF THE PHYSICS OF PLASMA SHEATHS TO THE MODELING OF RF-PLASMA REACTORS

被引：149

作者：

METZE, A ^{[1
]}

ERNIE, DW ^{[1
]}

OSKAM, HJ ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 09期

关键词：

D O I：

10.1063/1.337764

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3081 / 3087

页数：7

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