THERMAL TRANSPIRATION ERROR IN ABSOLUTE PRESSURE MEASUREMENT WITH CAPACITANCE MANOMETERS

被引：19

作者：

BALDWIN, GC ^{[1
]}

GAERTTNER, MR ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST, TROY, NY 12181 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 01期

关键词：

D O I：

10.1116/1.1317944

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：215 / 217

页数：3

共 11 条

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[5]

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[7] PRECISE PRESSURE MEASUREMENT IN RANGE 0.1-500 TORR [J].

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[8]

KENNARD EH, 1938, KINETIC THEORY GASES, P66

[9] RELIABLE SUBMICRON PRESSURE READINGS WITH CAPACITANCE MANOMETER [J].

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GRIFFITH, T .

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[10] THERMAL TRANSPIRATION - A CONTINUUM GASDYNAMICS VIEW [J].

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