LIGHT-SCATTERING FROM THE VOLUME OF OPTICAL THIN-FILMS - THEORY AND EXPERIMENT

被引:49
作者
KASSAM, S
DUPARRE, A
HEHL, K
BUSSEMER, P
NEUBERT, J
机构
[1] Physics and Technology Department, Friedrich Schiller University Jena, Jena
来源
APPLIED OPTICS | 1992年 / 31卷 / 09期
关键词
LIGHT SCATTERING; OPTICAL THIN FILMS; THIN-FILM MICROSTRUCTURES;
D O I
10.1364/AO.31.001304
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A theoretical model is presented that describes the volume scattering in thin optical films, particularly in typical columnar structures. It is based on a first-order perturbation theory that concerns the fluctuation of the dielectric permittivity in the film. For evaporated PbF2 films that show a pronounced columnar morphology, angular as well as total integrated scattering measurements at lambda = 633 nm have been performed on a special layer design to suppress roughness-induced scattering. A comparison of the predicted theoretical and the measured experimental values leads to such structural parameters as packing density and the evolutionary exponent of the columns.
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页码:1304 / 1313
页数:10
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