A SIMPLE SCANNING ELECTRON MICROSCOPE

被引：107

作者：

CREWE, AV

ISAACSON, M

JOHNSON, D

机构：

[1] Enrico Fermi Institute, Department of Physics, University of Chicago, Chicago

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1969年 / 40卷 / 02期

关键词：

D O I：

10.1063/1.1683910

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A simple scanning microscope has been built which uses a field emission electron gun alone, without the aid of auxiliary lenses. The design and operation of the microscope are described and the calculated performance is compared with experiment. Resolution of 100 Å has been obtained and is shown in transmission electron micrographs. The probe current is of the order of 10-10 to 10-11 A, a value which is high enough to allow micrographs to be taken with scan times of 10 sec. © 1969 The American Institute of Physics.

引用

页码：241 / &

共 17 条

[1]

BUTLER JW, 1966, 6 INT C EL MICR, V1, P191

[2]

CHARBONNIER FM, PRIVATE COMMUNICATIO

[3] ELECTRON GUN USING A FIELD EMISSION SOURCE [J].

CREWE, AV ;

EGGENBER.DN ;

WALL, J ;

WELTER, LM .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (04) :576-&

[4] SCANNING ELECTRON MICROSCOPES - IS HIGH RESOLUTION POSSIBLE [J].

CREWE, AV .

SCIENCE, 1966, 154 (3750) :729-&

[5]

CREWE AV, 1968, 26 P ANN EMSA M NEW, P356

[6]

CREWE AV, 1968, 26 P ANN EMSA M NEW, P359

[7]

Dyke W. P., 1956, Adv. Electron. Electron Phys, V8, P89, DOI DOI 10.1016/S0065-2539(08)61226-3

[8] SIMPLIFIED ANALYSIS OF POINT-CATHODE ELECTRON SOURCES [J].

EVERHART, TE .

JOURNAL OF APPLIED PHYSICS, 1967, 38 (13) :4944-&

[9]

GOMER R, 1961, FIELD EMISSION FIELD, pCH2

[10]

LEWIS RD, TO BE PUBLISHED

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