MODELING OF REACTIVE SPUTTERING OF COMPOUND MATERIALS

被引：350

作者：

BERG, S

BLOM, HO

LARSSON, T

NENDER, C

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 02期

关键词：

D O I：

10.1116/1.574104

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：202 / 207

页数：6

共 12 条

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