ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING - EXPERIMENT

被引：54

作者：

HAWRYLUK, RJ

SMITH, HI

SOARES, A

HAWRYLUK, AM

机构：

[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173

[2] MIT,DEPT PHYS,CAMBRIDGE,MA 02139

[3] MIT,DEPT ELECT ENGN,CAMBRIDGE,MA 01239

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 06期

关键词：

D O I：

10.1063/1.321929

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2528 / 2537

页数：10

共 23 条

[1]

BERNACKI SE, 1974, 6TH P INT C EL ION B, P34

[2]

EVERHART TE, 1960, J APPL PHYS, V31, P1883

[3] MODEL FOR EXPOSURE OF ELECTRON-SENSITIVE RESISTS [J].

GREENEICH, JS ;

VANDUZER, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06) :1056-1059

[4] EXPOSURE MODEL FOR ELECTRON-SENSITIVE RESISTS [J].

GREENEICH, JS ;

VANDUZER, T .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1974, ED21 (05) :286-299

[5]

GREENEICH JS, 1973, THESIS U CALIFORNIA

[6]

Griem H. R., 1964, PLASMA SPECTROSCOPY, P176

[7]

HATZAKIS M, 1971, 11TH S EL ION LAS BE, P337

[8]

HATZAKIS M, 1971, APPL PHYS LETT, V8, P7

[9] ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING [J].

HAWRYLUK, RJ ;

HAWRYLUK, AM ;

SMITH, HI .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (06) :2551-2566

[10]

HAWRYLUK RJ, 1974, 6TH P INT C EL ION B, P87

← 1 2 3 →