STRUCTURE DEFECTS IN PYROLTIC SILICON EPITAXIAL FILMS

被引：36

作者：

MILLER, DP

MOORE, CR

WATELSKI, SB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1963年 / 34卷 / 09期

关键词：

D O I：

10.1063/1.1729816

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2813 / &

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[8] STRUCTURE AND ORIGIN OF STACKING FAULTS IN EPITAXIAL SILICON [J].

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