THIN-FILM VACUUM EQUIPMENT

被引：0
|
作者：
HOFFMAN, V [1 ]
机构：
[1] VARIAN ASSOC,VACUUM DIV,PALO ALTO,CA 94303
来源：
SOLID STATE TECHNOLOGY | 1973年 / 16卷 / 12期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：93 / 99
页数：7
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